0. 1.250 -1.950 0. 14.000 39.000 0. 0. 0.033 0. 0.066 0. 0.099 0. 0.132 0. 0.164 0. 0.197 0. 0.230 0. 0.263 0. 0.296 0. 0.329 0. 0.362 0. 0.395 0. 0.428 0. 0.461 0. 0.493 0. 0.526 0. 0.559 0. 0.592 0. 0.625 0. 0.658 0. 0.691 0. 0.724 0. 0.757 0. 0.789 0. 0.822 0. 0.855 0. 0.888 0. 0.921 0. 0.954 0. 0.987 0. 1.020 0. 1.053 0. 1.086 0. 1.118 0. 1.151 0. 1.184 0. 1.217 0. 1.250 0. 12.000 0. -0.200 0.200 -0.200 0.250 -0.220 0.300 -0.300 0.350 -0.400 0.400 -0.600 0.850 -0.600 0.900 -0.400 0.950 -0.300 1.000 -0.220 1.050 -0.200 1.250 -0.200 6.000 0. -0.700 0.300 -0.700 0.300 -1.050 0.950 -1.050 0.950 -0.700 1.250 -0.700 2.000 0. -1.050 1.250 -1.050 39.000 0. -0.180 0.033 -0.180 0.066 -0.180 0.099 -0.180 0.132 -0.180 0.164 -0.180 0.197 -0.180 0.230 -0.180 0.263 -0.180 0.296 -0.180 0.329 -0.180 0.362 -0.180 0.395 -0.180 0.428 -0.180 0.461 -0.180 0.493 -0.180 0.526 -0.180 0.559 -0.180 0.592 -0.180 0.625 -0.180 0.658 -0.180 0.691 -0.180 0.724 -0.180 0.757 -0.180 0.789 -0.180 0.822 -0.180 0.855 -0.180 0.888 -0.180 0.921 -0.180 0.954 -0.180 0.987 -0.180 1.020 -0.180 1.053 -0.180 1.086 -0.180 1.118 -0.180 1.151 -0.180 1.184 -0.180 1.217 -0.180 1.250 -0.180 39.000 0. -0.260 0.033 -0.260 0.066 -0.260 0.099 -0.260 0.132 -0.260 0.164 -0.260 0.197 -0.260 0.230 -0.260 0.263 -0.260 0.296 -0.260 0.329 -0.260 0.362 -0.260 0.395 -0.260 0.428 -0.260 0.461 -0.260 0.493 -0.260 0.526 -0.260 0.559 -0.260 0.592 -0.260 0.625 -0.260 0.658 -0.260 0.691 -0.260 0.724 -0.260 0.757 -0.260 0.789 -0.260 0.822 -0.260 0.855 -0.260 0.888 -0.260 0.921 -0.260 0.954 -0.260 0.987 -0.260 1.020 -0.260 1.053 -0.260 1.086 -0.260 1.118 -0.260 1.151 -0.260 1.184 -0.260 1.217 -0.260 1.250 -0.260 39.000 0. -0.340 0.033 -0.340 0.066 -0.340 0.099 -0.340 0.132 -0.340 0.164 -0.340 0.197 -0.340 0.230 -0.340 0.263 -0.340 0.296 -0.340 0.329 -0.340 0.362 -0.340 0.395 -0.340 0.428 -0.340 0.461 -0.340 0.493 -0.340 0.526 -0.340 0.559 -0.340 0.592 -0.340 0.625 -0.340 0.658 -0.340 0.691 -0.340 0.724 -0.340 0.757 -0.340 0.789 -0.340 0.822 -0.340 0.855 -0.340 0.888 -0.340 0.921 -0.340 0.954 -0.340 0.987 -0.340 1.020 -0.340 1.053 -0.340 1.086 -0.340 1.118 -0.340 1.151 -0.340 1.184 -0.340 1.217 -0.340 1.250 -0.340 39.000 0. -0.420 0.033 -0.420 0.066 -0.420 0.099 -0.420 0.132 -0.420 0.164 -0.420 0.197 -0.420 0.230 -0.420 0.263 -0.420 0.296 -0.420 0.329 -0.420 0.362 -0.420 0.395 -0.420 0.428 -0.420 0.461 -0.420 0.493 -0.420 0.526 -0.420 0.559 -0.420 0.592 -0.420 0.625 -0.420 0.658 -0.420 0.691 -0.420 0.724 -0.420 0.757 -0.420 0.789 -0.420 0.822 -0.420 0.855 -0.420 0.888 -0.420 0.921 -0.420 0.954 -0.420 0.987 -0.420 1.020 -0.420 1.053 -0.420 1.086 -0.420 1.118 -0.420 1.151 -0.420 1.184 -0.420 1.217 -0.420 1.250 -0.420 39.000 0. -0.500 0.033 -0.500 0.066 -0.500 0.099 -0.500 0.132 -0.500 0.164 -0.500 0.197 -0.500 0.230 -0.500 0.263 -0.500 0.296 -0.500 0.329 -0.500 0.362 -0.500 0.395 -0.500 0.428 -0.500 0.461 -0.500 0.493 -0.500 0.526 -0.500 0.559 -0.500 0.592 -0.500 0.625 -0.500 0.658 -0.500 0.691 -0.500 0.724 -0.500 0.757 -0.500 0.789 -0.500 0.822 -0.500 0.855 -0.500 0.888 -0.500 0.921 -0.500 0.954 -0.500 0.987 -0.500 1.020 -0.500 1.053 -0.500 1.086 -0.500 1.118 -0.500 1.151 -0.500 1.184 -0.500 1.217 -0.500 1.250 -0.500 39.000 0. -0.580 0.033 -0.580 0.066 -0.580 0.099 -0.580 0.132 -0.580 0.164 -0.580 0.197 -0.580 0.230 -0.580 0.263 -0.580 0.296 -0.580 0.329 -0.580 0.362 -0.580 0.395 -0.580 0.428 -0.580 0.461 -0.580 0.493 -0.580 0.526 -0.580 0.559 -0.580 0.592 -0.580 0.625 -0.580 0.658 -0.580 0.691 -0.580 0.724 -0.580 0.757 -0.580 0.789 -0.580 0.822 -0.580 0.855 -0.580 0.888 -0.580 0.921 -0.580 0.954 -0.580 0.987 -0.580 1.020 -0.580 1.053 -0.580 1.086 -0.580 1.118 -0.580 1.151 -0.580 1.184 -0.580 1.217 -0.580 1.250 -0.580 39.000 0. -0.660 0.033 -0.660 0.066 -0.660 0.099 -0.660 0.132 -0.660 0.164 -0.660 0.197 -0.660 0.230 -0.660 0.263 -0.660 0.296 -0.660 0.329 -0.660 0.362 -0.660 0.395 -0.660 0.428 -0.660 0.461 -0.660 0.493 -0.660 0.526 -0.660 0.559 -0.660 0.592 -0.660 0.625 -0.660 0.658 -0.660 0.691 -0.660 0.724 -0.660 0.757 -0.660 0.789 -0.660 0.822 -0.660 0.855 -0.660 0.888 -0.660 0.921 -0.660 0.954 -0.660 0.987 -0.660 1.020 -0.660 1.053 -0.660 1.086 -0.660 1.118 -0.660 1.151 -0.660 1.184 -0.660 1.217 -0.660 1.250 -0.660 39.000 0. -0.703 0.033 -0.703 0.066 -0.703 0.099 -0.703 0.132 -0.703 0.164 -0.703 0.197 -0.703 0.230 -0.703 0.263 -0.703 0.295 -0.703 0.319 -0.738 0.362 -0.740 0.395 -0.740 0.428 -0.740 0.461 -0.740 0.493 -0.740 0.526 -0.740 0.559 -0.740 0.592 -0.740 0.625 -0.740 0.658 -0.740 0.691 -0.740 0.724 -0.740 0.757 -0.740 0.789 -0.740 0.822 -0.740 0.855 -0.740 0.888 -0.740 0.931 -0.738 0.955 -0.703 0.987 -0.703 1.020 -0.703 1.053 -0.703 1.086 -0.703 1.118 -0.703 1.151 -0.703 1.184 -0.703 1.217 -0.703 1.250 -0.703 45.000 0. -0.708 0.033 -0.708 0.066 -0.708 0.099 -0.708 0.132 -0.708 0.164 -0.708 0.197 -0.708 0.230 -0.708 0.263 -0.708 0.292 -0.707 0.295 -0.727 0.296 -0.765 0.303 -0.790 0.319 -0.815 0.359 -0.820 0.395 -0.820 0.428 -0.820 0.461 -0.820 0.493 -0.820 0.526 -0.820 0.559 -0.820 0.592 -0.820 0.625 -0.820 0.658 -0.820 0.691 -0.820 0.724 -0.820 0.757 -0.820 0.789 -0.820 0.822 -0.820 0.855 -0.820 0.891 -0.820 0.931 -0.815 0.947 -0.790 0.954 -0.765 0.955 -0.727 0.958 -0.707 0.987 -0.708 1.020 -0.708 1.053 -0.708 1.086 -0.708 1.118 -0.708 1.151 -0.708 1.184 -0.708 1.217 -0.708 1.250 -0.708 51.000 %fillstyle=1 0. -0.713 0.033 -0.713 0.066 -0.713 0.099 -0.713 0.132 -0.713 0.164 -0.713 0.197 -0.713 0.230 -0.713 0.263 -0.713 0.289 -0.711 0.290 -0.728 0.290 -0.765 0.293 -0.793 0.294 -0.814 0.297 -0.839 0.299 -0.863 0.308 -0.889 0.352 -0.900 0.395 -0.900 0.428 -0.900 0.461 -0.900 0.493 -0.900 0.526 -0.900 0.559 -0.900 0.592 -0.900 0.625 -0.900 0.658 -0.900 0.691 -0.900 0.724 -0.900 0.757 -0.900 0.789 -0.900 0.822 -0.900 0.855 -0.900 0.898 -0.900 0.942 -0.889 0.951 -0.863 0.953 -0.839 0.956 -0.814 0.957 -0.793 0.960 -0.765 0.960 -0.728 0.961 -0.711 0.987 -0.713 1.020 -0.713 1.053 -0.713 1.086 -0.713 1.118 -0.713 1.151 -0.713 1.184 -0.713 1.217 -0.713 1.250 -0.713 6 u.c. berkeley / sample (version: 01may83) plasma and ion etching contours profile i0= 0.0015 a0= 0. i3= 0.0001 a3= 0. i1= 0.0015 a1= 0. i4= 0. a4= 0. i2= 0.0001 a2= 0. i5= 0. a5= 0. contour times: 0. 53. 107. 160. 213. ...